close
Engineering

A method for reliably fabricating wafer-scale transition metal dichalcogenide field-effect transistors.

Gadget engineers are constantly attempting to foster more slender, more effective, and better performing semiconductors, the semiconductor gadgets at the center of most current hardware. To do this, they have been assessing the capability of a wide range of materials.

TMDs, which intensify in view of progress metals and chalcogen components, have enticing electronic and mechanical properties that make them promising contenders for the advancement of people in the future of semiconductors.Most of them have a molecularly slim design with no hanging bonds and a bandgap like that of silicon.

In spite of their favorable qualities, TMDs have not yet been utilized to make semiconductors with a huge scope. The main reason for this is the weak grip energy at the connection point between these materials and substrates, which makes their broad creation testing possible.

Scientists at Samsung Gadgets and the College of Chicago have as of late recognized a system that could empower a solid mix of TMD-based field-impact semiconductors (FETs) on a wafer scale. Their proposed approach, presented in a paper distributed by Nature Gadgets, depends on the utilization of grip lithography, a creative method to frame nanoscale holes between tests of unique materials.

“The low interfacial adhesion energy between two-dimensional materials and substrates, on the other hand, can result in low yields and non-uniform transistors on the wafer scale. Furthermore, traditional photolithography methods, such as photochemical reactions and chemical etching, can cause atomically thin materials to be damaged.”

Van Luan Nguyen and his colleagues wrote in their paper.

“Field-impact semiconductors in view of two-layered materials are a likely swap for silicon-based gadgets in cutting-edge semiconductor chips,” Van Luan Nguyen and his partners wrote in their paper. “In any case, the frail interfacial grip energy between two-layered materials and substrates can prompt low yields and non-uniform semiconductors on the wafer scale.” “Besides, regular photolithography processes, including photochemical responses and compound carving, can harm molecularly thin materials.”

As a feature of their review, Nguyen and his partners showed that the interfacial grip energy (IAE) between 2D materials and various substrates can be measured utilizing a four-point bowing strategy. They then developed 2D materials, molybdenum disulfide (MoS2) and graphene, utilizing compound fume testimony.

Hence, they concentrated on the impact of inborn material deformities on the materials’ IAE esteem over a huge surface region. To shape interfaces between the materials and substrates, they at last moved the materials onto a metal or protecting layer.

“We show that the interfacial grip energy between two-layered materials and various substrates can be measured utilizing a four-point bowing strategy,” Nguyen and his partners made sense of in their paper. “We find that a molybdenum disulfide/silicon dioxide interface has an interfacial bond energy of 0.2 J m2, which can be tweaked from 0 to 1.0 J m2 by integrating self-gathered monolayers with various end sciences. “We’re going to use this to develop a grip lithography strategy based on bond energy contrasts and actual drawing processes.”

Nguyen and his partners showed the possibility of their creation system by utilizing it to deliver nearly 10,000 molybdenum disulfide FETs on six-inch wafers, achieving a great yield of practically 100 percent. Later on, their proposed strategy could be idealized and further developed, possibly empowering the huge scope of FET creation in view of TMDs by lessening blunders and working on the bond between these materials and substrates.

More information: Van Luan Nguyen et al, Wafer-scale integration of transition metal dichalcogenide field-effect transistors using adhesion lithography, Nature Electronics (2022). DOI: 10.1038/s41928-022-00890-z

Journal information: Nature Electronics

Topic : Article